MODULUS

Multilayer Sputter Deposition System
Modular inline system for multiple applications

The SINGULUS TECHNOLOGIES inline sputter deposition system is designed for cleanroom production with loading and unloading of the substrates from one side and processing in a cleanroom environment and a minimized footprint. Depending on the requirements, the system can be configured as a completely contact-free transport solution. As a modular inline sputter system this machine is ready for applications in display and consumer electronic applications. In the different process modules, plasma treatment, RF sputtering and DC sputtering can be implemented as well as cooling & heating modules. The cooling systems maintain a low temperature without compromising on throughput. Essential is the exact temperature control which is required processing plastic substrates.

Nowadays typical applications could be find in the emerging touch panel industry:

One Glass Solution Technology
Modular plasma-enhanced chemical vapor deposition (PECVD) systems and inline physical vapor deposition (PVD) sputter systems provide process solutions for dedicated coating processes on glass like the deposition of Niob, SiO2 or ITO. The systems from SINGULUS TECHNOLOGIES are fully automated innovative and modular coating tools for the industrial production of modern touchscreen applications. The systems provide several customizable vacuum chambers for different processes. Scratch resistant coatings provide glass with durability and increased longevity. A high quality hard coating assures the best scratch resistance. Mobile display cover glass has to meet the requirements of crystal clear images, withstand every day application and allow smooth touch screen use.

Electro Magnetic Shielding for Mobile Applications
Mobile applications demand also a very high functional density for electromagnetic shielding interference. Cover shields do not provide the shielding quality required for the next generation of products. SINGULUS TECHNOLOGIES offers modular vacuum sputtering system providing the best solution to produce high quality metal layers in a cost effective and economical way. Electromagnetic shielding is the practice of reducing the electromagnetic field by blocking the field with barriers made of conductive or magnetic materials. Shielding is typically applied to enclosures to isolate electrical devices from the outside world. A commonly used shielding method, especially with electronic goods housed in plastic enclosures, is to deposit the inside of the product with a relatively thick copper layer to provide the best device shielding solution from high frequencies.

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