SELENIUS - Evaporation System for Thin-Film Solar
The inline co-evaporation tool is based on the thermal evaporation of all CIGS-related precursor materials. It is dedicated to the deposition of copper-indium-gallium-selenium layers for the purpose to form optimum precursor layers in the application of CIGS-thin-film solar cells.
The evaporation system consists of a handling station, multiple heating/cooling stations and deposition-chambers.
The inline evaporation system is offering proven thermal deposition technology, that delivers a high material utilization and excellent layer uniformity. In combination with a high uptime and mechanical yield, the system leads to a highly optimized and flexible production platform