Wet Process Systems for up to 300 mm Semiconductor Applications

High-end products in semiconductors like WAFER, MEMS and MRAM. Product range started with manual wet stations for R&D, semi-automated systems and up to fully automated tools for the chemical surface treatment like cleaning, etching and drying.

  • Manual Wet Process Stations
  • Semi- and Fully Automated Wet Process Stations
  • Quartztube- and Part-Cleaning Stations
  • Total Metal Free Working Stations
  • Special Customer Specified Units
  • Chemical Supply Systems (pump or pressure systems)
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