Wet Process Systems for up to 300 mm Semiconductor Applications
High-end products in semiconductors like WAFER, MEMS and MRAM. Product range started with manual wet stations for R&D, semi-automated systems and up to fully automated tools for the chemical surface treatment like cleaning, etching and drying.
- Manual Wet Process Stations
- Semi- and Fully Automated Wet Process Stations
- Quartztube- and Part-Cleaning Stations
- Total Metal Free Working Stations
- Special Customer Specified Units
- Chemical Supply Systems (pump or pressure systems)