Modular, Automated Wet Processing System for Batch Cleaning and Etching for Solar Cells

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  • High throughput 6000-13800 wph gross; M0-M12+
  • High uptime
  • Low breakage rate
  • Ozone-enhanced cleaning & etching
  • Short and stable IPA-free texturing process
  • Appropriate and effective rinsing and drying

SINGULUS TECHNOLOGIES provides complete automated dry-in/dry-out solutions for wet-chemical treatments of Si-wafers in standard and high-efficiency cell lines. The introduced  modular SILEX III batch system offers a wide range of process options. With respect to highest flexibility in configuration, the SILEX III machine is characterized by a clear modular design and a compact footprint. The SILEX III machine concept fulfills current and future requirements of capacity, flexibility and reliability for mass production.

The SILEX III was specially designed for larger production volumes. With this mass production system about 550 MW annual capacity are possible for Heterojunction cell manufacturing. The SILEX III system achieves an output starting from 6000 up to 14000 WPH (gross)

All SILEX III systems are running with very low scrap rates down to 0.01 % and a high process yield.

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