Vacuum Sputtering Machines
SINGULUS TECHNOLOGIES has delivered far more than 8,500 vacuum sputtering machines since its foundation in 1995. For all processes and applications, SINGULUS TECHNOLOGIES uses its know-how in automation and process technologies as well as the integration of production steps and works on transferring these solutions to additional areas of application.
More product details:
- GENERIS PVD – Inline Sputtering System with Horizontal Substrate Transport
- HISTARIS – Inline Sputtering System with Horizontal Substrate Transport for Glass Applications
- VISTARIS – Inline Sputtering System with Vertical Substrate Transport
- Sputtering Systems for R&D and Pilot Production
- POLYCOATER – Inline Sputtering Machine for Metallization of 3D Parts
- TIMARIS – Semiconductor Cluster Tool
- DECOLINE II with Integrated Sputtering Module