Thin Film Deposition

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DECOLINE II
Inline Coating System for 3-Dimensional Parts

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GENERIS PVD
Inline Sputtering System for Heterojunction Solar Cells

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PERCEUS
Production Package for PERC Solar Cells

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ROTARIS
Universal Sputtering System

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TIMARIS
PVD Production Platform for Semiconductor & Magnetic Storage

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VISTARIS
HISTARIS

Inline Sputtering for Large Substrates with Vertical & Horizontal Substrate Transport

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BLULINE III
Production System for High Quality Blu-ray Discs with up to 100 Gigabyte Storage

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SKYLINE II
Replication Line for CD & DVD 5


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GENERIS PECVD
Inline Plasma Enhanced Chemical Vapor Deposition System for AlOx and SiNy on PERC Solar Cells

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MODULUS
Multilayer Sputtering Deposition System

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POLYCOATER
Inline Sputtering System for 3-Dimensional Parts

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SINGULUS 3DS
Fully Automated Inline Refinement of 3-Dimensional Plastic Substrates

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SOLARE
Turn-key Production System for Solar Cells

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VISTARIS
HISTARIS

适用于垂直和水平大尺寸基板运输的在线溅射设备

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SPACELINE II
The best gets better again!

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