Vacuum Evaporation Tool

The vacuum evaporation tool is based on the thermal evaporation of all CIGS-related precursor materials. It is dedicated to the deposition of copper-indium-gallium-selenium layers for the purpose to form optimum precursor layers in the application of CIGS-thin-film solar cells. The vacuum evaporation tool consists of a handling station, multiple heating/cooling stations and deposition-chambers.

The vacuum evaporation tool is offering leading-edge thermal deposition technology for CIGS, that delivers a high material utilization and excellent layer uniformity. In combination with a high uptime and mechanical yield, the tool leads to a highly optimized and flexible production platform for evaporation of CIGS modules.

Main Features

• High throughput capability
• Modular chamber design
• Flexible layout conception to meet the production requests of the customer
• Optimized evaporation source utilization through unique chamber design (minimized wall deposition)
• High deposition speed and repeatability
• Excellent flux uniformity
• Easy and fast source refilling/replacement
• Excellent temperature uniformity
• Substrate pre-heating
• In-situ monitoring of flux and temperature