Vacuum Evaporation Tool

for Thin-Film Solar

The vacuum evaporation tool is based on the thermal evaporation of all CIGS-related precursor materials. It is dedicated to the deposition of copper-indium-gallium-selenium layers for the purpose to form optimum precursor layers in the application of CIGS-thin-film solar cells. The vacuum evaporation tool consists of a handling station, multiple heating/cooling stations and deposition-chambers.

The vacuum evaporation tool is offering leading-edge thermal deposition technology for CIGS, that delivers a high material utilization and excellent layer uniformity. In combination with a high uptime and mechanical yield, the tool leads to a highly optimized and flexible production platform for evaporation of CIGS modules.

Main Features

  • High throughput capability
  • Modular chamber design
  • Flexible layout conception to meet the production requests of the customer
  • Optimized evaporation source utilization through unique chamber design (minimized wall deposition)
  • High deposition speed and repeatability
  • Excellent flux uniformity
  • Easy and fast source refilling/replacement
  • Excellent temperature uniformity
  • Substrate pre-heating
  • In-situ monitoring of flux and temperature

 

 

 

 

 

 

 

 

 

OK

We use cookies to ensure the functionality and security of this website. In addition, third parties may set up individual documents and pages cookies. By using this site, you agree to the use of cookies. For more information on changing this setting, and the cookies used can be found at this link.