Vacuum Evaporation Tool
for Thin-Film Solar
The vacuum evaporation tool is based on the thermal evaporation of all CIGS-related precursor materials. It is dedicated to the deposition of copper-indium-gallium-selenium layers for the purpose to form optimum precursor layers in the application of CIGS-thin-film solar cells. The vacuum evaporation tool consists of a handling station, multiple heating/cooling stations and deposition-chambers.
The vacuum evaporation tool is offering leading-edge thermal deposition technology for CIGS, that delivers a high material utilization and excellent layer uniformity. In combination with a high uptime and mechanical yield, the tool leads to a highly optimized and flexible production platform for evaporation of CIGS modules.
Main Features
- High throughput capability
- Modular chamber design
- Flexible layout conception to meet the production requests of the customer
- Optimized evaporation source utilization through unique chamber design (minimized wall deposition)
- High deposition speed and repeatability
- Excellent flux uniformity
- Easy and fast source refilling/replacement
- Excellent temperature uniformity
- Substrate pre-heating
- In-situ monitoring of flux and temperature
