BLULINE II

The following features characterize
the BLULINE II concept:
  • Dedicated to production of BD ROM SL/DL
  • Cycle time BD SL < 4.0 s / BD DL < 4.5 s
  • Highly integrated design
  • All production stepsincluded
  • Thickness Measurement Device (TMD) for metallized layers with close loop control for the cathode
  • Spectrometer for spacer-layer and cover-layer measuring with close loop control for spin process
  • High productivity, high uptime
  • Clear structured disc flow
  • Automated handling of BD through all productionsteps
  • Minimum space required
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