SELENIUS Evaporation System

Processing Systems for Evaporation of CIGS Thin-Film Solar Cells

Evaporation System for Thin-Film Solar

The inline co-evaporation tool is based on the thermal evaporation of CIGS-related precursor materials. It is dedicated to the deposition of copper-indium-gallium- selenium layers for the purpose to form optimum precursor layers in the application of CIGS thin- lm solar modules.The evaporation system consists of a handling station, multiple substrate heating/cooling stations and deposition chambers.

The inline evaporation system is offering proven thermal deposition technology, that delivers a high material utilization and excellent layer uniformities. In combination with a high uptime and yield, the system leads to a highly optimized and flexible production platform.


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