Inline Wet Process Equipment for Cleaning, Alkaline & Acidic Etching, Single Side Treatment, Polish Etch & PSG Removal & Inline Ozone Applications

SINGULUS TECHNOLOGIES provides complete automated dry-in/dry-out solutions for wet-chemical treatment of Si-wafers in standard high-efficiency cell lines.

The ongoing evolution of proven concepts in process management and the integration of innovative approaches are the basis for the development of a new generation of horizontal wet processing systems.

LINEX is an inline wet processing platform with horizontal substrate transport for Si wafers. The SINGULUS TECHNOLOGIES LINEX system combines an advanced transportation system and sustainable/ innovative processing modules with proven and ef cient chemical treatment.

In addition to proven processes, the focus is on new applications such as single side treatment, polish etching, emitter etching and ozone applications. The highly integrated design, high throughput, high availability and low breakage rates make LINEX very attractive for solar cell manufacturers worldwide.


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