Wet Process Systems for up to 300 mm Semiconductor Applications

Download Broschure Wet Process Systems

Download Broschure manWPS

Download Broschure semWPS

High-end products in semiconductors like WAFER, MEMS and MRAM. Product range started with manual wet stations for R&D, semi-automated systems and up to fully automated tools for the chemical surface treatment like cleaning, etching and drying.

  • Manual Wet Process Stations
  • Semi- and Fully Automated Wet Process Stations
  • Quartztube- and Part-Cleaning Stations
  • Total Metal Free Working Stations
  • Special Customer Specified Units
  • Chemical Supply Systems (pump or pressure systems)

We use cookies to ensure the functionality and security of this website. In addition, third parties may set up individual documents and pages cookies. By using this site, you agree to the use of cookies. For more information on changing this setting, and the cookies used can be found at this link.