Fully Automated Wet Process

  • Fully Automated Systems executed for max. 2x6” (Dry-In / Dry-Out) for Mask Cleaning Application
  • NMP Cleaning System with cascaded NMP process bathes and rinser
  • Applications:
    • Cleaning of mask application with NMP solution
    • Fully automated system with buffering
    • Optimized footprint of the systems (vs. linear)
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