Semi Automated Wet Process

  • Semi Automated Wet Process Systems executed for max. 2x6” for e.g. bipolar IC’s, Metal Gate CMOS, MOSAIC
  • Applications:
    • Semi automated systems with rotary robot arm system dedicated to one process bath and rinse for loading and unloading and agitation inside the process bath
    • In total package 6 semi automated systems for different cleaning and etching applications
    • Execution of the system according FM 4910

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