Wet Systems for Sensor Applications

  • Wet Systems executed for max. 2x6” for sensor applications
  • Package existing of Fully Automated Wet Stations, Manual Wet Stations and Chemical Supply Systems
  • Applications:
    • RCA (with Megasonic), Au & TiW Etching, Cr Etching, Nitride Etch, KOH Etching, Membrane Etch (TMAH – fully automatic system), Mask Cleaning and Post Metal Ash Residue Removal
    • Chemical Supply System including piping and POU boxes for NH4OH, H2O2, HCl, H3PO4, KOH, H2SO4, TMAH, HF, HNO3 and BHF
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