Wet Systems for Sensor Applications

  • Wet Systems executed for max. 2x6” for sensor applications
  • Package existing of Fully Automated Wet Stations, Manual Wet Stations and Chemical Supply Systems
  • Applications:
    • RCA (with Megasonic), Au & TiW Etching, Cr Etching, Nitride Etch, KOH Etching, Membrane Etch (TMAH – fully automatic system), Mask Cleaning and Post Metal Ash Residue Removal
    • Chemical Supply System including piping and POU boxes for NH4OH, H2O2, HCl, H3PO4, KOH, H2SO4, TMAH, HF, HNO3 and BHF

We use cookies to ensure the functionality and security of this website. In addition, third parties may set up individual documents and pages cookies. By using this site, you agree to the use of cookies. For more information on changing this setting, and the cookies used can be found at this link.