Press Release


Bernhard Krause
Singulus Technologies AG
Hanauer Landstrasse 103, 63796 Kahl am Main, Germany
Tel.:     +49 (0) 1709202924
Fax:     +49 (0) 61 88 - 4 40 - 1110
SINGULUS TECHNOLOGIES Offers at SNEC Shanghai Extensive Knowledge for the Key Production Steps for CIGS Thin-Film Solar Panels
April 12, 2013
  • Selenisation furnace CISARIS
  • Sputtering machine
  • Buffer layer wet processing equipment TENUIS
  • Wet processing systems VITRUM

Kahl am Main, April 12, 2013 – Production capacities for CIS/CIGS based cells will further rise in the coming years. Based on the CIGS processes, SINGULUS TECHNOLOGIES is able to provide customers all relevant lines and has gained extensive know-how to reduce the production costs together with the customers, to increase the cell performance, and to enhance cell output.

For the development of CIGS solar cells with a substrate size of 
300 x 300 mm, SINGULUS offers a modular cluster type tool. With this machine, innovative and large-scale implementable production processes for CIGS solar cells can be developed targeting new process combinations. Many research and development areas display the demand for such cost-efficient development tools.

CISARIS Rapid Thermal Processing
The CISARIS oven from SINGULUS TECHNOLOGIES is an inline rapid thermal processing equipment, designed for the CIGSSe absorber formation on large area glass substrates. The process can safely handle the thermal processing of large glass substrates of over 1 sq. m at temperatures up to 600 °C under toxic and corrosive gas atmosphere. High heating and cooling rates, combined with an excellent temperature and gas homogeneity during all process stages are the key factors which allow the formation of an optimal CIGSSe absorber required for the production of high efficiency solar modules.

CISARIS consists of a handling station, a vacuum tight process section, and a return conveyor and is optimized for the mass production of CIS solar modules. Per year, CISARIS provides a production capacity of over 25 MWp.

Sputtering Systems
SINGULUS TECHNOLOGIES also offers new processing systems for vacuum coating CIGS thin-film solar cells. The systems respond to the demand in the photovoltaic industry for development and production tools that enhance the efficiency of thin-film solar cells, while cutting production costs by using the state-of-the-art technologies. For PV technology, SINGULUS develops and manufactures coating systems which can apply special layers and layer systems on different materials. Inline sputter systems are significant in today’s thin-film solar cell production.

New Generation of Wet Process Equipment for Economic Processing of CdS/Alternative Buffer Layer for CIGS Solar Cells
SINGULUS TECHNOLOGIES presents a promising new development on the way to the efficient wet-chemical coating of thin-film solar modules made of copper-indium-gallium-diselenide (CIGS) on glass: the second generation of the TENUIS production line has a modular cluster build basis and enables both significant savings in terms of required floor space and the simultaneous one-side coating of two substrates. SINGULUS offers wet processing systems from R&D over pilot use to full production range 60, 120, 180 and more MW.

Due to new and unique concepts in terms of dosing and temperature control, SINGULUS` developers were successful in reducing the process time by up to 20 %, which has a positive effect and a considerably higher output in production.

Inline Wet Process Equipment, Etching, Cleaning & Single Side Coating for Thin-Film Solar Cells
The modular design of the SINGULUS inline wet process equipment VITRUM II allows the easy integration of different process steps according to the requirements of CIGS, a-Si or CdTe technology (etching, rear side and substrate edge etching, cleaning, and single side coating).

The design of the VITRUM II features similar piping for all liquid circuits and generously dimensioned installation compartments for optimized maintenance work.

The second generation VITRUM enables homogeneous, reliable and reproducible etching. It features further advantages in comparison to a dipping bath, such as a higher etch length and concentration, a higher process speed of up to 5 m/min, and minimized carryover.

The design of the VITRUM GEN 2 improves the accessibility for optimized maintenance work in a large installation cabinet. Piping is similar for all liquid circuits. It offers a high cycle rate and is also easy to integrate into existing production lines.

SINGULUS TECHNOLOGIES develops innovative technologies for efficient production processes which only make use of resources conservatively. New production technology combined with sustainable processes and the use of new materials can decouple the use of resources from economic growth in the long-term. SINGULUS TECHNOLOGIES’ innovative power and competitiveness are strengthened by these new technologic developments.

With the Optical Disc segment, SINGULUS TECHNOLOGIES is the market leader for CD, DVD and Blu-ray Disc production equipment. As the only engineering company worldwide, SINGULUS TECHNOLOGIES today already provides the machine technology for three-layer Blu-ray Discs with a storage volume of about 100 GB. In the Solar division, SINGULUS TECHNOLOGIES is a recognized supplier for new machine concepts and production processes for crystalline and thin-film solar cells which increase the efficiency of solar cells and reduce their production costs.  SINGULUS TECHNOLOGIES establishes itself as a development partner and machine supplier for technologies enabling a sustainable energy provision on the basis of renewable energies.

In the Semiconductor segment, SINGULUS TECHNOLOGIES focuses its activities on the vacuum coating of wafers with ultra-thin layers for the production of MRAM memory, thin-film write/read heads, and other semiconductor applications.

SINGULUS TECHNOLOGIES continues to expand its know-how in vacuum coating, the automation, and process technology as well as the integration of manufacturing lines in order to develop new work areas. To strengthen the existing business activities, SINGULUS TECHNOLOGIES is currently reviewing concrete acquisition opportunities.

Please visit us at SNEC, International Photovoltaic Power Generation
Conference & Exhibition 2013, May 13-16, 2013, Shanghai, China,
Booth No. E3 615.

Singulus Technologies Aktiengesellschaft, Hanauer Landstraße 103,
D-63796 Kahl/Main, ISIN: DE0007238909, WKN: 723890


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