PVD Cluster Tool

Applications & Technologies

  • Preclean Etch
  • Metal Deposition
  • Al, Ti, Mg, Cu, Ta
  • Metal-Oxides
  • Ta2O5, HfO2, SiO2
  • DC/RF Sputtering

We use cookies that are necessary to ensure the functionality and security of this website. Singulus Technologies uses "Google Analytics" cookies for statistical purposes. With the button on the right you can agree to this. You can find more information under this link.