Skip to main content


Selenization System

Selenization/Sulphurization/Sublimation with High-End Rapid Thermal Processing

Home » Products – PVD, PECVD & Wet Processing » CISARIS X3 inline rapid thermal processing system

Inline Selenization Furnace – Features:

  • Third generation inline selenization furnace with optimized cycle time
  • Rapid heating (up to ~ 4 °C/s) of large glass substrates
  • Uniform heating of large substrates up to 600 °C
  • Uniform cooling of substrates to avoid glass warpage
  • Excellent temperature control (mean variation < 5 °C)

Inline Rapid Thermal Processing System

The CISARIS X3 oven is a new inline rapid thermal processing system designed for the CIGSSe absorber formation on large area glass substrates. CISARIS consists of a handling station, a vacuum tight process section, and a return conveyor and is optimized for the mass production of CIGS solar modules.

The main features of the CISARIS include a high uptime and mechanical yield, as well as a fast cycle time which, in combination with the robust selenization process, leads to a production capacity of over 75 MWp per year (depending on configuration). CISARIS is a proven innovative and reliable production tool, which has been newly developed at SINGULUS TECHNOLOGIES based on the previous generation of selenization ovens.

CISARIS can safely handle the thermal processing of large glass substrates of over 1 sqm at temperatures up to 600 °C and beyond under a toxic and corrosive gas atmosphere. High heating and cooling rates, combined with an excellent temperature homogeneity during all process stages are the key factors, which allow the formation of an optimal CIGSSe absorber, required for the production of high efficiency thin-film solar modules.

Please accept marketing-cookies to see this PDF.

You have feedback or more questions?
Get in touch with us!

Phone: +49 6188 440-1292

Quick contact to our sales team
Cookie Einstellungen Cookie Setup