Load and unload of substrate from the same side of the machine
Usage of rotatable cylindrical magnetrons for highest utilization of target material
Temperature processing before and during deposition available
Smallest machine footprint through turn chamber technology
SINGULUS TECHNOLOGIES offers proven sputtering systems with vertical substrate transport with the brand name VISTARIS. One major application is today’s CIGS & CdTe thin-film solar cell production. These systems have been developed to enhance the efficiency of thin-film solar cells, while cutting production costs by using the state-of-the-art technologies. For photovoltaic technology, SINGULUS TECHNOLOGIES develops and manufactures coating systems which can apply special layers and layer systems on different substrates. In addition to applications in the solar sector, this system also offers ideal conditions for other applications such as large glass surfaces. Examples are transparent front or metallic back contact layers as well as multilayered precursors with a broad range of different materials.
The VISTARIS system is design for sputtering material like ITO, AZO and metallic layers like Mo, Al, Cu, Ag, NiV. The main advantage of the system is the use of vertical vacuum-based coating of glass substrates in various industries.
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