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  • Order from semiconductor industry confirms leading position of SINGULUS TECHNOLOGIES for production systems for magnetic coatings
  • Application: production of latest-generation magnetic (TMR) sensors
  • For growth markets such as electromobility and photovoltaics

Kahl am Main, 20 October 2021 – SINGULUS TECHNOLOGIES AG has received an order from a European semiconductor manufacturer for a vacuum coating system of the type ROTARIS. The application area is the series production of high-precision magnetic TMR (Tunnel Magneto Resistance) sensors that are increasingly finding use e.g., in the automotive sector, in PV inverters and for industrial applications. The contract volume is in the low single-digit million euros.

The cluster tools of the type ROTARIS enables layers to build up in an ultra-high vacuum in production conditions with a reproducibility accurate to one tenth of an angstrom (10-11 m). That is less than one atomic monolayer distributed homogeneously over a wafer with a diameter of 300 mm.

Such extreme precision is essential e.g., in TMR sensors which make use of tunnel magnetoresistance. TMR sensors show higher resistance changes than conventional AMR, GMR or Hall sensors and exhibit a very large dynamic range. They can be used e.g., to measure indirect line currents reliably and with electrical isolation, based on their magnetic field. Applications include the automotive industry, the charging infrastructure for electric vehicles and PV inverters.

Dr. rer. nat. Christian Strahberger, Chief Operating Officer (COO) and responsible for Semiconductor area at SINGULUS TECHNOLOGIES: “Following extensive examination of the coating results, our customer established that the ROTARIS vacuum coating system delivers the best results in terms of layer thickness control and coating quality.”

The vacuum coating system, which operates using the sputtering principle, reinforces the market position of SINGULUS TECHNOLOGIES as a manufacturer and development partner for innovative coating technologies for the various different semiconductor applications. The ROTARIS system uses the rotating substrate module principle. As well as lending itself to uses in industrial manufacturing, the machine is perfect for research and development applications that call for a high degree of flexibility.

SINGULUS TECHNOLOGIES – Technologies for a Sustainable World

Responsible and sustainable corporate governance is very important to SINGULUS TECHNOLOGIES. SINGULUS TECHNOLOGIES develops and assembles innovative machines and systems for efficient and resource-saving production processes, which are used worldwide in the solar/hydrogen, semiconductor, medical technology, consumer goods and data storage sectors. SINGULUS TECHNOLOGIES regards sustainability as an opportunity to position itself with innovative products that follow this spirit.

In the focus are:

  • environmental awareness
  • efficient use of resources
  • avoidance of unnecessary CO₂ pollution

The company’s core competencies include various processes of coating technology, surface treatment and wet-chemical and thermal production processes.

SINGULUS TECHNOLOGIES AG, Hanauer Landstraße 103,
D-63796 Kahl/Main, WKN A2AA5H / ISIN DE000A2AA5H5
Maren Schuster, Investor Relations, Tel.: + 49 (0) 160 9609 0279
Bernhard Krause, Corporate Communications, Tel.: +49 (0) 172 833 2224

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