Sputtering

Vacuum Sputtering

GENERIS PVD – Modular Sputtering System for High Performance Cells

PVD Sputtering at a Glance

SINGULUS TECHNOLOGIES has delivered far more than 8,500 vacuum sputtering machines since its foundation in 1995. The machines range from high vacuum deposition machines applying extremely thin layers of around 0.2 nm for the semiconductor industry down to high throughput sputtering machines for metallizing of e.g. a lipstick cover in 0.3 s. PVD Sputtering Systems from SINGULUS TECHNOLOGIES are mainly used in photovoltaics, data storage, sensor technology and decorative coatings but also in other applications such as hydrogen, battery, automotive, electrical shielding, and advanced packing applications.

A close cooperation with scientific institutes like Fraunhofer ISE, Helmholtz-Zentrum Berlin (HZB), and SERIS as well as with research organizations and institutes in the USA and China allow SINGULUS TECHNOLOGIES to participate and make use of the latest solar research results worldwide. Well known sputtering methods are direct current (DC) sputtering for electrically conductive targets and radio frequency (RF) sputtering for nonconductive targets. Magnetron sputtering is available on the market in different modes like DC, pulsed DC, bipolar and RF. Due to its versatility, the convenient control of the process and the possibility to apply it on a large scale at low cost, sputter deposition or sputtering is widely used in different industries as well as in R&D applications.

TIMARIS III – Sputtering system for semiconductor applications

Features for SINGULUS TECHNOLOGIES PVD Sputtering

  • Over 8,500 sputtering devices in the field worldwide
  • Deposition systems for substrates larger than 1 m² in the field
  • In-house cathode design with magnetron development
  • Simulation of sputtering processes with lab equipment in-house
  • In-house software development
  • Cooperation with scientific institutes in Europe, USA, China, and Singapore
  • R&D department and lab dedicated to PVD and PECVD applications/activities
  • Electrical and mechanical design department with high experience in thin-film technology and vacuum process technology
  • Systems for vertical and horizontal substrate transport orientation
  • Magnetron sputtering in diverse modes like DC, pulsed DC, bipolar and RF available
  • Modular process chamber configuration

Applications for PVD Sputtering

  • Metals, oxides, nitrides and TCOs
  • Reflector, contact, isolating and semiconductor layers
  • Optical layers (AR, reflector)
  • Protective layers (diffusion barriers, scratch resistant layers)
  • Special magnetic layer stacks (spintronics, inductors etc.)
  • Decorative coatings
  • Antibacterial coating (e.g., Cu based)
  • Thermal protection layers (low-E)
  • Bipolar plates
  • Positioning in New Markets
POLYCOATER – PVD Sputtering system for 3D parts

SINGULUS TECHNOLOGIES develops and assembles innovative machines and systems for efficient and resource-saving production processes, which are used worldwide in the Photovoltaics, Semiconductor, Medical Technology, Packaging, Glass & Automotive as well as Battery & Hydrogen markets. The company’s core competencies include various processes of coating technology, surface treatment as well as wet-chemical and thermal production processes.