Precise thin film deposition at atomic level by alternating introduction of precursor gases. Used in the semiconductor industry and for demanding applications.
Glossary Vacuum Coating
Anti-reflective coating (AR)
Coating to reduce reflections on glass and optical surfaces, e.g. in camera lenses and displays.
Barrier layer
Thin film that prevents the penetration of gases or moisture, e.g. in the packaging or electronics industry.
BLULINE
Inline sputtering system for sputtering processes
Cathode sputtering (sputtering)
Physical process for the deposition of thin metal layers by ion bombardment of the target material (target).
Decorative coating
Glossy or colored coatings for decorative purposes, e.g. on plastic or metal parts.
Checking the layer thickness
Precise control of the coating thickness by adjusting the process parameters, such as power and duration.
Chemical vapor deposition (CVD)
Gas phase process for the chemical deposition of films on substrates, e.g. in the semiconductor and solar industries.
Electron beam coating (e-beam coating)
A PVD process in which electron beams are used to vaporize materials in a vacuum chamber and deposit them on substrates.
EVARIS
Vacuum evaporation system
GENERIS PET
Inline process system for edge passivation of solar cells
GENERIS PVD
Inline sputtering system with horizontal substrate transport, ideal for solar cells and small glasses.
HISTARIS PVD
Inline sputtering system with horizontal substrate transport for glass, CIGS and CdTe solar cells.
Hydrophobic coating (Easy Care Coating)
Water-repellent coatings that keep out dust and dirt, e.g. on spectacle lenses.
Immersion coating
Coating by immersing a substrate in a liquid, often for uniform layers.
Magnetron sputtering
Efficient variant of sputtering in which magnetic fields increase the ion density. Often used for architectural glass, electronics and optics.
Ion plating
A combination of PVD and ion beam technology that improves the adhesion and density of thin films.
Metallizing
Deposition of metal layers (e.g. aluminum, gold) on substrates, e.g. for electrical conductivity or aesthetics.
Nano-coating
Thin-film coatings in the nanometer range, e.g. for functional or decorative purposes.
Nanometer
Unit of length, 1 nanometer = 0.000001 millimeter.
Optical coatings
Coatings for improving or modifying the optical properties of glasses or lenses, e.g. for anti-reflection or light filtering.
PECVD (Plasma Enhanced Chemical Vapor Deposition)
Process for the deposition of thin films by chemical vapor deposition in a plasma.
Phase change materials
Materials that alternate between amorphous and crystalline states, e.g. for optical data storage.
POLYCOATER
Inline sputtering system especially for 3D parts.
PVD (Physical Vapor Deposition)
Family of processes for the physical deposition of thin films, e.g. by sputtering, electron beam or thermal evaporation.
Reactive sputtering
Process for producing composite thin films by reacting a target with reactive gases such as oxygen or nitrogen.
SELENIUS
Inline evaporation system for large glass substrates.
Solar layer
Active thin film on solar cells for energy generation.
SPACELINE
Replication line for the production of DVDs.
Spin coating
Process for coating substrates by spinning liquid materials.
Sputtering
Physical process for the deposition of thin metal layers by ion bombardment of the target material (target).
STREAMLINE
Fully automatic replication line for recordable discs.
Target
The target material that is deposited on a substrate by sputtering or evaporation.
Thermal evaporation
Thin film deposition process in which materials are heated in a vacuum until they vaporize and deposit on substrates.
Thin-Film Technology
Technology for depositing extremely thin layers of material, e.g. for electronics or optical applications.
TIMARIS
Vacuum sputtering system, specialized in the production of MRAM wafers and read/write heads.
Carrier material (substrate)
Material on which the thin film is deposited, e.g. glass, silicon or plastic.
Thermal insulation coatings
Thin-film coatings that reduce thermal conductivity, e.g. for architectural glass.
UV curing
Curing of coatings or adhesives by irradiation with ultraviolet light. Often used for protective coatings or functional surfaces.
Vacuum chamber
Closed room in which a vacuum is generated to prevent contamination during the coating processes and to ensure the quality of the thin layers.
VISTARIS PVD
Inline sputtering system with vertical substrate transport for glass, CIGS and CdTe solar cells.
