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Nano Deposition Tools for Semiconductor

SINGULUS TECHNOLOGIES is a renowned manufacturer of advanced thin-film deposition equipment for magnetic sensors (TMR, GMR, AMR), integrated inductors, MRAM, µLED, Advanced Packaging (RDL/UBM), Interconnects, and other semiconductor applications. It is the trusted partner in the respective industry and extends its leadership in the thin-film deposition technology for semiconductor applications.

The cluster tools from SINGULUS TECHNOLOGIES with the brand name TIMARIS offer a complete portfolio of process modules for a variety of applications.

  • Magnetic sensor (TMR, GMR, AMR,)
  • Integrated inductors
  • µLED
  • Advanced Packaging (RDL, UBM)
  • Integrated voltage regulator (Buck Converter)
  • MEMS
  • TMR, pTMR – MRAM
  • High moment materials
  • TFH reader & writer
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