Nano Deposition Tools for Semiconductor
SINGULUS TECHNOLOGIES is a renowned manufacturer of advanced thin-film deposition equipment for magnetic sensors (TMR, GMR, AMR), integrated inductors, MRAM, µLED, Advanced Packaging (RDL/UBM), Interconnects, and other semiconductor applications. It is the trusted partner in the respective industry and extends its leadership in the thin-film deposition technology for semiconductor applications.
The cluster tools from SINGULUS TECHNOLOGIES with the brand name TIMARIS offer a complete portfolio of process modules for a variety of applications.
- Magnetic sensor (TMR, GMR, AMR,)
- Integrated inductors
- µLED
- Advanced Packaging (RDL, UBM)
- Integrated voltage regulator (Buck Converter)
- MEMS
- TMR, pTMR – MRAM
- High moment materials
- TFH reader & writer