Thin-Film Coating and Surface Treatment

Vacuum Coating

GENERIS PVD – Inline Sputtering System with Horizontal Substrate Transport

Generis PECVD – System for Plasma-enhanced CVD (PECVD) Processes

HISTARIS – Inline Sputtering  System with Horizontal Substrate Transport for Glass Applications

VISTARIS – Inline Sputtering  System with Vertical Substrate Transport

SELENIUS – Processing Systems for Evaporation of CIGS Thin-Film Solar Cells

Deposition Systems (PVD & PECVD) for R&D and Pilot Production

POLYCOATER – Inline Sputtering Machine for Metallization of 3D Parts

DECOLINE II with Integrated Lacquering System

CISARIS X 3 – Selenization/Sulphurization with High-End Rapid Thermal Process

CSS – Close Spaced Sublimation (CSS) for the Production of CdTe Solar Modules

Semiconductor

TIMARIS – Semiconductor Cluster Tool

TIMARIS – Overview Modules

TIMARIS – System Platform

Wet Processing

SILEX III – Batch System for High Performance Solar Cells

MEDLINE – Cleaning & Deposition of Medical Products

Lacquering

PAINTLINE Inline Lacquering System for 3D Parts

DECOLINE II with Integrated Lacquering System