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MATERIA PCE – Poly Chunk Etch

Advanced Cleaning of Silicon

Home » Products – PVD, PECVD & Wet Processing » MATERIA PCE – Poly Chunk Etch
SINGULUS TECHNOLOGIES production equipment follows the requirements of the latest PV cell processes, high throughput,low material and media consumption, thus enabling to improve cell efficiency, to save energy and raw materials and to reduce manufacturing costs for highly efficient solar cells.

With the MATERIA platforms, SINGULUS TECHNOLOGIES offers an advanced product solution for silicon raw material preparation. The MATERIA is a batch system for chemical etching, cleaning, and drying of mono & multi silicon chunks and Ingot Off Cuts. The system is adapted to the high purity demand in silicon production. Simultaneously, lowest possible total cost of ownership has been a key driver in the development of this machine. The MATERIA is a fully automated system for high throughput industrial production.

Main Features
  • For poly silicon (electronic, solar or UMG grade)
  • Chunk sizes between 10 and 180 mm (other formats upon request)
  • Throughput: from 500 tons p.a. to 3000 tons p.a. (other upon request)
  • Built for non-stop utilization: 24/7, 365 days/year
  • High availability (uptime > 95 %)
  • Compliance with international safety regulations
  • Flexible coupling to adjacent processes
  • Carrier return and management system
Controlled, Precise, Intelligent

Real-time Siemens S7-300 plc control of wet bench

  • State-of-the-art full graphic user interface
  • Prepared for connection to Manufacturing Execution System (MES), e.g., via OPC, XML, or SECS/GEM
  • Network communication support
  • Carrier tracking and data logging
  • Electronic weighing of chunk load
  • Chemical concentration monitoring
  • Highly accurate chemical dosing
High Flexibility in Process Design
  • Acidic etching process, alkaline etching process, or combined process and/or multiple cleaning combinations, i.e., Ozone cleaning, Ultrasonic cleaning, High Pressure Spray
  • Multi-recipe management via graphical user interface or MES
  • Process supports available
By Using Optimized Process Baskets
  • Short drying time
  • Minimized carry-over of water and acid
Low Cost-of-Ownership
  • Minimized freshwater consumption
  • Minimized chemical consumption
  • Continuous tracking of consumption data

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