Unique PVD Platforms for Critical Semiconductor Processes & Applications
(all configurations are available for 200 mm and 300 mm)
TIMARIS EMERGING MEMORY
TIMARIS EMERGING MEMORY Platform
- 10+4 targets for 8 & 12“ HVMDC / Pulsed
- DC / RF sputtering
- Magnetic and non-magnetic materials
- Uniformity ~1 % 1σ
- Sub Å control with unique LDD technology
Applications
- Emerging memory, e.g. MRAM, RRAM, PCRAM, etc.
- Sensors
- Advanced optical applications
- Special application
TIMARIS FTM
TIMARIS FTM Platform
- 2 modules of 8 targets in total
- DC/PulsedDC/RFsputtering
- Thicknesses from 0.1 nm to 8 nm
Applications
- Integrated voltage regulator
- High performance magnetic inductors
- Laminated layers with total thickness up to 8 μm
TIMARIS STM
TIMARIS STM Platform
- Max. 6 process modules
- Single target module
- Pre-clean module
- Heater module (batch & single)
Applications
- High performance μ-LED
- Low damage ITO
- PZT
- Interconnections
TIMARIS RSM
TIMARIS RSM Platform
- Up to 24 targets for 8 inch
- DC / Pulsed DC / RF sputtering
- Magnetic and non-magnetic materials
- Uniformity ~1 % 1σ
- Co-sputtering available
Applications
- Magnetic sensors AMR / GMR / TMR
- Magnetostriction application
- Electrostriction application
You have feedback or more questions?
Get in touch with us!
Phone: +49 6188 440-1292
Email: sales@singulus.de