Numerous SINGULUS TECHNOLOGIES vacuum sputtering machines are in operation in the solar industry, where SINGULUS TECHNOLOGIES provides the GENERIS PVD as a high throughput inline sputtering system platform with horizontal substrate transport. The substrates are automatically transported through the process chambers of the GENERIS PVD, following the inline principle, and applying coatings on both sides. The sputtering system safeguards a high level of layer thickness uniformity with high layer reproducibility, high productivity and at the same time very low operating expenses (OPEX).
SINGULUS TECHNOLOGIES takes advantage of in-house magnetron development, simulation and optimization of different sputtering processes and in-house component and process developed using state-of-the-art sputtering lab equipment at SINGULUS TECHNOLOGIES R&D center. Newly developed processes can be directly adapted to the GENERIS PVD mass production platform.