CISARIS CX3 Selenization System

Selenization/Sulphurization/Sublimation with High-End Rapid Thermal Processing

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Features

  • Third generation inline selenization furnace with optimized cycle time
  • Rapid heating (up to ~ 4 °C/s) of large glass substrates
  • Uniform heating of large substrates up to 600 °C
  • Uniform cooling of substrates to avoid glass warpage
  • Excellent temperature control (mean variation < 5 °C)

The CISARIS CX3 oven is a new inline rapid thermal processing system designed for the CIGSSe absorber formation on large area glass substrates. CISARIS consists of a handling station, a vacuum tight process section, and a return conveyor and is optimized for the mass production of CIGS solar modules.

The main features of the CISARIS include a high uptime and mechanical yield, as well as a fast cycle time which, in combination with the robust selenization process, leads to a production capacity of over 75 MWp per year (depending on configuration). CISARIS is a proven innovative and reliable production tool, which has been newly developed at SINGULUS TECHNOLOGIES based on the previous generation of selenization ovens.

CISARIS can safely handle the thermal processing of large glass substrates of over 1 sqm at temperatures up to 600 °C and beyond under a toxic and corrosive gas atmosphere. High heating and cooling rates, combined with an excellent temperature homogeneity during all process stages are the key factors, which allow the formation of an optimal CIGSSe absorber, required for the production of high efficiency thin-film solar modules.

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