CISARIS Selenization/Sulphurization/Sublimation – Features:

• Third generation inline selenization furnace with optimized cycle time
• Rapid heating (up to ~ 4 °C/s) of large glass substrates
• Uniform heating of large substrates up to 600 °C
• Uniform cooling of substrates to avoid glass warpage
• Excellent temperature control (mean variation < 5 °C)

The CISARIS X3 oven is a new inline rapid thermal processing system designed for the CIGSSe absorber formation on large area glass substrates. The CISARIS Selenization/Sulphurization/Sublimation with High-End Rapid Thermal Processing System consists of a handling station, a vacuum tight process section, and a return conveyor and is optimized for the mass production of CIGS solar modules.

The main features of the CISARIS Selenization/Sulphurization/Sublimation with High-End Rapid Thermal Processing include a high uptime and mechanical yield, as well as a fast cycle time which, in combination with the robust selenization process, leads to a production capacity of over 75 MWp per year (depending on configuration). CISARIS is a proven innovative and reliable production tool, which has been newly developed at SINGULUS TECHNOLOGIES based on the previous generation of selenization ovens.