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Synergies in Vacuum Coating & Wet Processing

Vacuum Coating

Turn-Key Solutions – for High Performance Solar Cells

GENERIS PVD – Inline Sputtering System with Horizontal Substrate Transport

GENERIS PVD for Hydrogen

GENERIS PET – Passivated Edge Technology

Generis PECVD – System for Plasma-enhanced CVD (PECVD) Processes

HISTARIS PVD – Inline Sputtering System with Horizontal Substrate Transport for Glass

VISTARIS PVD– Inline Sputtering  System with Vertical Substrate Transport

SELENIUS – Processing Systems for Evaporation of CIGS Thin-Film Solar Cells

Deposition Systems (PVD & PECVD) for R&D and Pilot Production

POLYCOATER – Inline Sputtering Machine for Metallization of 3D Parts

DECOLINE II with Integrated Lacquering System

CISARIS X3 Selenization/Sulphurization with High-End Rapid Thermal Process

CSS – Close Spaced Sublimation (CSS) for the Production of CdTe Solar Modules

EVARIS – Horizontal Inline Vacuum Evaporation System

Semiconductor

TIMARIS – Semiconductor Cluster Tool

TIMARIS – Overview Modules

TIMARIS – System Platform

PCB Manufacturing

VCPM+ System for Advanced Via Filling System for Printed Circuit Board (PCB) Manufacturing

VHF Systems for High-Precision Via Filling in Printed Circuit Boards (PCBs) Using Either Conductive or Non-Conductive Paste

SV Grinding Machine for Removal of Excess Plugging Paste from Printed Circuit Boards (PCBs) and Inner Layers after the Via Filling Process

Substrate Drying

LD Lift Dryer for Heating, Drying, and Curing of Products and Assemblies in Industrial Applications

MT Magazine Dryer for Heating Ceramics and Drying Pastes in Industrial Production Processes

PD Paternoster Dryer for Heating, Drying, Curing, e.g., of Products and Assemblies

Wet Processing

IMPEDIO – R2R Wet Chemistry System

SILEX III – Batch System for High Performance Solar Cells

SILEX BPP – Inline Wet Processing System

MEDLINE – Cleaning & Deposition of Medical Products

GERULUS – Wafer Block Pre-Clean & Deglue System

MATERIA – Advanced Cleaning of Silicon

Lacquering

PAINTLINE Inline Lacquering System for 3D Parts

PAINTLINE Compact
Lacquering Systems for 3D Parts

DECOLINE II with Integrated Lacquering System

Turn-Keys Solution

Turn-Key Solutions – For High Performance Solar Cells

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