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Vacuum Coating

SINGULUS TECHNOLOGIES has delivered far more than 8,500 vacuum PVD sputtering machines, PECVD systems and evaporation systems s well as since its foundation in 1995.

The machines range from ultra-high vacuum deposition machines applying extremely thin layers of around 0.2 nm for the semiconductor industry down to high throughput sputter machines for metallizing of e.g. a lipstick cover in 0.3 s. These Systems are mainly used in photovoltaics, data storage, sensor technology and decorative coatings as well as hydrogen, battery, automotive, electrical shielding and advanced packing applications.

  • PVD Sputtering and PECVD systems  systems for substrates larger than 1 m² in the field
  • In-house cathode design with magnetron development as well as own PECVD source
  • Simulation of sputtering processes with lab equipment in-house
  • Cooperation with scientific institutes in Europe, USA, China and Singapore
  • R&D department and lab dedicated to PVD and PECVD applications/activities
  • Electrical and mechanical design department with high experience in thin-film technology
    and vacuum process technology
  • Systems for vertical and horizontal substrate transport orientation as well as 3D PVD sputtering systems
  • Magnetron sputtering in diverse modes like DC, pulsed DC, bipolar and RF available
  • Modular process chamber configuration


  • Metals, oxides, nitrides and TCOs
  • Reflector, contact, isolating and semiconductor layers
  • Optical layers (AR, reflector)
  • Protective layers (diffusion barriers, scratch resistant layers)
  • Special magnetic layer stacks (spintronics, inductors etc.)
  • Decorative coatings of 3D parts
  • Antibacterial coating (e.g. Cu based)
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