Vacuum Evaporation System for Thin-Film Solar and Other Applications
Features
SELENIUS Evaporation System – Features:
- Optimized maintenance concept for maximum machine availability/uptime
- High deposition speed
- Excellent temperature uniformity during process sequence
- Substrate pre-heating
- In-situ monitoring of flux and temperature
- Proven safety concept based on solid risk management and safety engineering
SELENIUS Evaporation System – Features:
- Inline evaporation tool with high throughput capability
- Modular chamber design supports a flexible layout conception to meet the production requests of the customer
- Optimized evaporation source utilization through unique chamber design (minimized wall deposition)
- High deposition speed and repeatability
- Excellent flux uniformity
- Easy and fast source refilling/replacement due to user-friendly source positioning
The SELENIUS inline evaporation system is based on the thermal evaporation of all CIGS-related precursor materials. It is dedicated to the deposition of copper-indium-gallium-selenium layers for the purpose to form optimum precursor layers in the application of CIGS-thin-film solar cells.
The SELENIUS evaporation system consists of a handling station, multiple heating/cooling stations and deposition-chambers. The SELENIUS evaporation system is offering proven thermal deposition technology, that delivers a high material utilization and excellent layer uniformity. In combination with a high uptime and mechanical yield, the system leads to a highly optimized and flexible production platform.
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SINGULUS SALES TEAM
Phone: +49 6188 440-1292
Email: sales@singulus.de